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Motion Series
- XY Stage
XY Stage - Stage XY
High precision XY movement
Installing direction free
Motor driven versions available
UHV use
Baking temperature: ≤200 °C
| XY STAGE | |||||
| Codice | Flangia | Flangia base | X, Y Travel | ||
| XY70-70-35 XY70-70-38 XY70-70-40 |
ICF70 | CF35 CF38 CF40 |
ICF70 | CF35 CF38 CF40 |
± 10,0 |
| XY114-70-35 XY114-70-38 XY114-70-40 |
ICF114 | CF63 | ICF70 | CF35 CF38 CF40 |
± 10,0 |
| XY114-114 | ICF114 | CF63 | ICF114 | CF63 | ± 10,0 |
| XY152-70-35 XY152-70-38 XY152-70-40 |
ICF152 | CF100 | ICF70 | CF35 CF38 CF40 |
± 10,0 |
| XY152-114 | ICF114 | CF63 | ICF152 | CF100 | ± 10,0 |
| Unità di misura: mm | |||||
